Si-based sensor

英 美
  • 硅基传感器
  • based adj.在...居住(或工作);基地(或总部)在...;为基础的动词base的过去式和过去分词
  • sensor n.传感器;探测器
  • si n.国际单位制
    1. The characteristics and requests of micromachining for silicon based sensors are introduced.The conventional methods of si substrate microfabrication are briefly described.
      叙述了硅基传感器微机械加工的特点和要求,简要说明了硅衬底微细加工的常用方法。