The relationship of nitriding results with different nitrogen plasma fluxes was discussed. 讨论了氮等离子体流量对混合法氮化效果的影响。
The nitrogen partial-flow rates are increased in reactive sputtering, thus the thermal stability of TaN is decreased and work-function is increased. 若制程中增加溅镀机里的氮气流量，则所制作出来的氮化钽之功函数会增加而其热稳定性将会降低。
